Polysilicon Hydrogen Recovery System

Trichlorosilane tail gas is rich in hydrogen, chlorosilanes, and hydrogen chloride. While the gaseous components are relatively stable, leakage can easily pollute the environment. Furthermore, trichlorosilane can react with trace amounts of water in the air to hydrolyze into silicon dioxide and hydrochloric acid, accelerating valve damage and affecting the safety of on-site equipment and personnel. Our company’s trichlorosilane tail gas recovery device effectively separates high-value-added hydrogen and utilizes the low boiling point of chlorosilanes to recover them.

Process Principle:

The polysilicon reduction tail gas enters a circulating condensation and scrubbing tower. Under different pressure conditions, it undergoes a series of distillations, gas stripping, and deep cooling processes in a chlorosilane stripping tower and an HCl distillation tower. Through multi-stage gas-liquid distillation, stripping, and scrubbing, hydrogen and liquid HCl are separated, recovering high-purity hydrogen and liquid thermal HCl. This process transforms the polysilicon tail gas from waste into valuable resources, conserves resources, and reduces energy consumption during the treatment process.

Technical features:

(1) Low raw material consumption.

(2) Hydrogen recovery, purification, and recycling.

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